Challenges for Electron Tomography of Nanoscale Electrical Devices: Geometry and Beam Damage

M Mecklenburg; B Shevitski; S Singer; B Regan

doi:10.1017/S1431927611008610

Challenges for Electron Tomography of Nanoscale Electrical Devices: Geometry and Beam Damage

Published online by Cambridge University Press: 08 April 2017

S Singer and

M Mecklenburg: Affiliation:
University of California, Los Angeles
B Shevitski: Affiliation:
University of California, Los Angeles
S Singer: Affiliation:
University of California, Los Angeles
B Regan: Affiliation:
University of California, Los Angeles

Article contents

Extract

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type: Abstract
Information: Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1548 - 1549

DOI: https://doi.org/10.1017/S1431927611008610 [Opens in a new window]

Article contents

Challenges for Electron Tomography of Nanoscale Electrical Devices: Geometry and Beam Damage

Extract

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests