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Capturing Die Layout of Obsolete ASIC Using Extreme Field of View SEM

Published online by Cambridge University Press:  01 August 2010

J Gazda ,
A Jachniewicz ,
C Sallee  and
R Young
J Gazda
Affiliation:
Cerium Laboratories LLC
A Jachniewicz
Affiliation:
Crossfield Technology Inc
C Sallee
Affiliation:
Smart Imaging Technologies Inc
R Young
Affiliation:
FEI Company

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 618 - 619
Copyright
Copyright © Microscopy Society of America 2010