Hostname: page-component-cd9895bd7-gvvz8 Total loading time: 0 Render date: 2024-12-27T12:12:17.571Z Has data issue: false hasContentIssue false
  • English
  • Français

Blind Estimation of Tip Geometry in Scanned Probe Microscopy

Published online by Cambridge University Press:  02 July 2020

J. S. Villarrubia
J. S. Villarrubia*
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD20899, USA
Get access

Extract

In topographs produced by scanned probe microscopy, positive-going surface features are broadened due to the non-vanishing tip size. This well-known imaging artifact is of particular importance for feature width or surface microroughness determinations. Its correction requires a 3-d model of the tip.

Most proposed methods of tip estimation begin with the same set of experimental conditions and model assumptions. Experimentally, a special specimen (a “tip characterizer”) is imaged with the unknown tip. The image model assumes the image is formed by contact of the tip with the surface at one or more points without significant bending of the tip or compression of the surface. Under these circumstances, it has been shown1 that I = S ⊕ P, where S is the set of all points in the specimen, P a reflection of the tip through the origin, I the image, and ⊕ denotes dilation.

Type
Scanned Probe Microscopies: Technologies, Methodologies, and Applications
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 1259 - 1260
Copyright
Copyright © Microscopy Society of America 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Pingali, G.S. and Jain, R., Proc. EEEE Workshop on Applications of Computer Vision, 282 (1992).Google Scholar
2.Reiss, G. et al., Appl. Phys. Lett. 57, 867 (1990); Gallarda, H. and Jain, R., Proc. of Conference on Integrated Circuit Metrology, Inspection, and Process Control, V, SPIE Vol. 1464, 459 (1991); Keller, D., Surf. Sci. 253, 353 (1991); Keller, D.J. and Franke, F.S., Surf. Sci. 294, 409 (1993); Others too numerous to mention in this space.10.1063/1.103390CrossRefGoogle Scholar
3.Villarrubia, J. S., Surf. Sci. 321, 287 (1994); J. Vac. Sci. Technol. B 14, 1518 (1996);10.1016/0039-6028(94)90194-5CrossRefGoogle Scholar
4.Villarrubia, J.S., J. Res. Natl. Inst. Stand. & Technol., in press.Google Scholar