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Beam Induced Composition Modifications During Electron Beam Microanalysis

Published online by Cambridge University Press:  02 July 2020

D. G. Howitt  and
D. L. Medlin
D. G. Howitt
Affiliation:
Department of Chemical Engineering and Materials Science, University of California, Davis, CA, 95616.
D. L. Medlin
Affiliation:
Sandia National Laboratories, Livermore, California 94551-0969
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Extract

The most common cause of composition modification to a specimen during electron probe microanalysis is the field induced migration of light elements. This is an indirect effect which occurs in response to the long range electric fields that form when dielectric specimens suffer charge imbalance. The result is that the ions are redistributed within the sample according to their respective mobilities and the affect is enhanced rather than eliminated when the sample is coated. The ions typically move radially outward in thin samples because of the excess production of secondary electrons from the specimen surfaces, Cazaux(1986)and downwards in conventional SEM samples when the field is due primarily to the deposition of electrons within the bulk of the specimen

Field induced migration is responsible for most of the elemental signal variations observed during the microanalysis of silicate glasses containing sodium or potassium ions.

Type
Problem Elements and Spectrometry Problems in X-Ray Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 228 - 229
Copyright
Copyright © Microscopy Society of America

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References

Cazaux, J. (1986), “Some Considerations on the Electric Field Induced in Insulators by Electron Bombardment” Journal of Applied Physics 59 (5), 1418–1430.CrossRefGoogle Scholar
Miotello, A., Mazzoldi, P. (1982), “Numerical Analysis of Field-Assisted Sodium Migration in Electron-Irradiated Glasses” J. Phys. C: Solid State Physics 15, 5615–5621.CrossRefGoogle Scholar
Walker, T.M., Howitt, D.G. (1989), “Field-Induced Migration of Sodium in Soda-Silicate Glasses during Scanning Electron Microscopy” Scanning 11, 5–11.CrossRefGoogle Scholar