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Beam Energy Dependent Calibration of STEM and BSE Detectors for Thin Film Thickness Estimation

Published online by Cambridge University Press:  30 July 2020

Radim Skoupy  and
Vladislav Krzyzanek
Radim Skoupy
Affiliation:
The Czech Academy of Sciences, Institute of Scientific Instruments, Brno, Jihomoravsky kraj, Czech Republic
Vladislav Krzyzanek
Affiliation:
The Czech Academy of Sciences, Institute of Scientific Instruments, Brno, Jihomoravsky kraj, Czech Republic

Abstract

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Type
Pushing the Limits of Detection in Quantitative (S)TEM Imaging, EELS, and EDX
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1946 - 1948
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Copyright
Copyright © Microscopy Society of America 2020

References

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Skoupy, R., Fort, T., Krzyzanek, V., Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration, Nanomaterials. 10 (2020). doi:10.3390/nano10020332.Google Scholar
The authors gratefully acknowledge funding from the Technology Agency of the Czech Republic (project TN01000008), the Ministry of Industry and Trade of the Czech Republic (project TRIO FV30271); the infrastructure by the Czech Academy of Sciences (project RVO:68081731).Google Scholar