Avoiding the Curtaining Effect: Backside Milling by FIB INLO

Stephen M. Schwarz; Brian W. Kempshall; Lucille A. Giannuzzi1; Molly R. McCartney

doi:10.1017/S1431927603441044

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Dunin-Borkowski, Rafal E. Newcomb, Simon B. Kasama, Takeshi McCartney, Martha R. Weyland, Matthew and Midgley, Paul A. 2005. Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors. Ultramicroscopy, Vol. 103, Issue. 1, p. 67.

Formanek, Petr and Bugiel, Eberhard 2006. Specimen preparation for electron holography of semiconductor devices. Ultramicroscopy, Vol. 106, Issue. 4-5, p. 365.

Kendrick, Anthony B Moore, Thomas M and Zaykova-Feldman, Lyudmila 2006. Mechanical Conversion for High-Throughput TEM Sample Preparation. Journal of Physics: Conference Series, Vol. 26, Issue. , p. 227.

Langford, Richard 2007. Focused Ion Beam Systems. p. 215.

Dunin–Borkowski, R.E. Kasama, T. and Harrison, R.J. 2007. Nanocharacterisation. p. 138.

Schaffer, Miroslava Schaffer, Bernhard and Ramasse, Quentin 2012. Sample preparation for atomic-resolution STEM at low voltages by FIB. Ultramicroscopy, Vol. 114, Issue. , p. 62.

Dunin-Borkowski, Rafal E Kasama, Takeshi and Harrison, Richard J 2015. Nanocharacterisation. p. 158.

Lotnyk, A. Poppitz, D. Ross, U. Gerlach, J.W. Frost, F. Bernütz, S. Thelander, E. and Rauschenbach, B. 2015. Focused high- and low-energy ion milling for TEM specimen preparation. Microelectronics Reliability, Vol. 55, Issue. 9-10, p. 2119.

Giannuzzi, Lucille A. Yu, Zhiyang Yin, Denise Harmer, Martin P. Xu, Qiang Smith, Noel S. Chan, Lisa Hiller, Jon Hess, Dustin and Clark, Trevor 2015. Theory and New Applications ofEx SituLift Out. Microscopy and Microanalysis, Vol. 21, Issue. 4, p. 1034.

Hayes, Garrett J. and Clemens, Bruce M. 2015. Laser liftoff of gallium arsenide thin films. MRS Communications, Vol. 5, Issue. 1, p. 1.

Denisyuk, Andrey Hrnčíř, Tomáš Vincenc Oboňa, Jozef Sharang Petrenec, Martin and Michalička, Jan 2017. Mitigating Curtaining Artifacts During Ga FIB TEM Lamella Preparation of a 14 nm FinFET Device. Microscopy and Microanalysis, Vol. 23, Issue. 3, p. 484.

Tait, C. Ryan Yan, Lifan and Millunchick, Joanna M. 2018. Spontaneous nanostructure formation in GaAsBi alloys. Journal of Crystal Growth, Vol. 493, Issue. , p. 20.

Dunin-Borkowski, Rafal E. Kovács, András Kasama, Takeshi McCartney, Martha R. and Smith, David J. 2019. Springer Handbook of Microscopy. p. 767.

Boureau, Victor Durand, Aurèle Gergaud, Patrice Le Cunff, Delphine Wormington, Matthew Rouchon, Denis Claverie, Alain Benoit, Daniel and Hÿtch, Martin 2020. Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs. Journal of Applied Crystallography, Vol. 53, Issue. 4, p. 885.

Seyring, M. Wanierke, F. Kaaden, T. Lippmann, S. and Rettenmayr, M. 2021. Influence of natural oxide layers at Ni/NiAl interfaces on Ni3Al phase formation. Materials Characterization, Vol. 174, Issue. , p. 111032.

Zhang, Zijian Wang, Wanting Dong, Zuoyuan Yang, Xin Liang, Fang Chen, Xinqian Wang, Chaolun Luo, Chen Zhang, Jiayan Wu, Xing Sun, Litao and Chu, Junhao 2022. The Trends of In Situ Focused Ion Beam Technology: Toward Preparing Transmission Electron Microscopy Lamella and Devices at the Atomic Scale. Advanced Electronic Materials, Vol. 8, Issue. 9,

Lee, Hee-Beom Jung, Min-Hyoung Kim, Young-Hoon Park, Eun-Byeol Jang, Woo-Sung Kim, Seon-Je Choi, Ki-ju Park, Ji-young Hwang, Kee-bum Shim, Jae-Hyun Yoon, Songhun and Kim, Young-Min 2023. Deep learning image segmentation for the reliable porosity measurement of high-capacity Ni-based oxide cathode secondary particles. Journal of Analytical Science and Technology, Vol. 14, Issue. 1,

Castagna, Marc J and Klahn, Samuel 2023. Geometric Failures in the Preparation a STEM/TEM Sample with a FIB/SEM. Microscopy and Microanalysis, Vol. 29, Issue. Supplement_1, p. 426.

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Avoiding the Curtaining Effect: Backside Milling by FIB INLO

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