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Automation of In-trench TEM Lamella Workflow Increasing Throughput for Lift-out
Published online by Cambridge University Press: 30 July 2020
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- Vendor Symposium - Materials Preparation
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- Copyright © Microscopy Society of America 2020
References
Yuzhe, Z. et al. , “Advanced ex-situ TEM sample preparation for full metal process samples”, 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (2017), p. 1-3.Google Scholar
Hrnčíř, T. et al. , “Variable Angle TEM Grid Holder for Advanced TEM Lamellae Preparation”, ISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis (2019), p. 219-222.Google Scholar
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