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Automatic End-point Detection for Ar+ Milling of FIB in situ and ex situ Lift-out Specimens from Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

C.S. Bonifacio ,
L.A. Giannuzzi ,
P. Nowakowski ,
J.T. Harbaugh ,
M. Campin ,
M. Boccabella ,
M. Ray  and
P.E. Fischione
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
L.A. Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL, USA
P. Nowakowski
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
J.T. Harbaugh
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
M. Campin
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
M. Boccabella
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
M. Ray
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 854 - 855
Copyright
© Microscopy Society of America 2018 

References

[1] Giannuzzi, LA Stevie, FA Micron 30 1999) p. 197.Google Scholar
[2] Giannuzzi, LA in Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice. ed. LA Giannuzzi and FA Stevie Springer New York City p. 201.Google Scholar
[3] Nowakowski, P, et al., Microscopy and Microanalysis 23 2017) p. 300.Google Scholar
[4] Bonifacio, CS, et al., Microscopy and Microanalysis 23 2017) p. 268.Google Scholar
[5] The authors thank Kevin McIlwrath of JEOL USA for STEM image acquisition.Google Scholar