Automated STEM/EDS Metrology Characterization of 3D NAND Devices

Zhenxin Zhong; Justin Roller; Oleksii Bidiuk; Jeff Blackwood; Martin Verheijen; Ozan Ugurlu; Jason Donald

doi:10.1017/S1431927617007954

Abstract

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References

[1] Schlossmacher, Peter, et al, Microscopy and Analysis Nanotechnology Supplement 2010). p. s5.Google Scholar

[2] Ugurlu, Ozan, et al, SPIE Proceedings 8681 2013). p. 868107.CrossRef Google Scholar

Crossref Citations

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Tilson, Ashley and Strauss, Michael 2018. STEM/EDS Metrology and Statistical Analysis of 3D NAND Devices. p. 1.

Ohashi, Takeyoshi Yamaguchi, Atsuko Hasumi, Kazuhisa Ikota, Masami Lorusso, Gian Tan, Chi Lim Van den bosch, Geert and Furnémont, Arnaud 2018. Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM. Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue. 02, p. 1.

Zhong, Zhenxin Donald, Jason Dutrow, Gavin Roller, Justin Ugurlu, Ozan Verheijen, Martin Bidiuk, Oleksii Adan, Ofer and Ukraintsev, Vladimir A. 2018. Toward reliable and repeatable automated STEM-EDS metrology with high throughput. p. 101.

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Hong, Peizhen Xia, Zhiliang Yin, Huaxiang Li, Chunlong and Huo, Zongliang 2019. A High Density and Low Cost Staircase Scheme for 3D NAND Flash Memory: SDS(Stair Divided Scheme). ECS Journal of Solid State Science and Technology, Vol. 8, Issue. 10, p. P567.

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Hong, Peizhen Xu, Qiang Hou, Jingwen Bai, Mingkai Zhao, Zhiguo Jin, Lei Huo, Zongliang and Li, Chunlong 2022. Pre-metal dielectric PE TEOS oxide pitting in 3D NAND: mechanism and solutions. Semiconductor Science and Technology, Vol. 37, Issue. 2, p. 025007.

Batool, Mariah Godoy, Andres O. Birnbach, Martin Dekel, Dario R. and Jankovic, Jasna 2023. Evaluation of Semi-Automatic Compositional and Microstructural Analysis of Energy Dispersive Spectroscopy (EDS) Maps via a Python-Based Image and Data Processing Framework for Fuel Cell Applications. Journal of The Electrochemical Society, Vol. 170, Issue. 5, p. 054511.

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Gnanasekaran, Karthik Strauss, Michael Zhou, Jiashi Jiang, Lin Gu, Xiaoting Zhong, Zhenxin Sendelbach, Matthew J. and Schuch, Nivea G. 2024. Automated TEM metrology and EDS characterization of plan view DRAM capacitors. p. 121.

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Automated STEM/EDS Metrology Characterization of 3D NAND Devices

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