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Automated and Shaped-Controlled Liquid STEM Nanolithography

Published online by Cambridge University Press:  23 September 2015

Raymond R. Unocic ,
Andrew R. Lupini ,
Albina Y. Borisevich ,
Sergei V. Kalinin  and
Stephen Jesse
Raymond R. Unocic
Affiliation:
Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831 Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831
Andrew R. Lupini
Affiliation:
Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831 Materials Science & Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831
Albina Y. Borisevich
Affiliation:
Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831 Materials Science & Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831
Sergei V. Kalinin
Affiliation:
Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831 Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831
Stephen Jesse
Affiliation:
Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831 Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1127 - 1128
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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[7] Research supported by Oak Ridge National Laboratory's Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy, Office of Science User Facility. (RRU, SVK, and SJ) Additional support provided by the Division of Materials Sciences and Engineering Division, Office of Basic Energy Sciences, U.S. DOE. (ARL and AYB).Google Scholar