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Atomic Scale Analysis of Dopants in CMOS Structures by Atom Probe Tomography

Published online by Cambridge University Press:  25 July 2016

Isabelle Martin ,
Robert Estivill ,
Marc Juhel ,
Adeline Grenier ,
Ty J. Prosa  and
David J. Larson
Isabelle Martin
Affiliation:
CAMECA Instruments, Inc., Madison, WI, 53711USA
Robert Estivill
Affiliation:
STMicroelectronics, Crolles, 38926France Univ. Grenoble Alpes, Grenoble, 38000France Univ. de Rouen, Groupe de Physique des Matériaux, 76800France
Marc Juhel
Affiliation:
STMicroelectronics, Crolles, 38926France
Adeline Grenier
Affiliation:
Univ. Grenoble Alpes, Grenoble, 38000France
Ty J. Prosa
Affiliation:
CAMECA Instruments, Inc., Madison, WI, 53711USA
David J. Larson
Affiliation:
CAMECA Instruments, Inc., Madison, WI, 53711USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 1534 - 1535
Copyright
© Microscopy Society of America 2016 

References

References:

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[3] Vurpillot, F., et al, Ultramicroscopy 111 (2011). p. 1286.CrossRefGoogle Scholar