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Atom-by-Atom Analysis of Rare-Earth Dopants implanted in Silicon

Published online by Cambridge University Press:  01 August 2010

M Couillard ,
G Radtke ,
AP Knights  and
GA Botton
M Couillard
Affiliation:
McMaster University, Canada
G Radtke
Affiliation:
Centre Nationale de la Recherche Scientifique, France
AP Knights
Affiliation:
McMaster University, Canada
GA Botton
Affiliation:
McMaster University, Canada

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 90 - 91
Copyright
Copyright © Microscopy Society of America 2010