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Atom Scale Characterization of the Near Apex Region of an Atomic Force Microscope Tip

Published online by Cambridge University Press:  30 July 2010

Christopher J. Tourek  and
Sriram Sundararajan
Christopher J. Tourek
Affiliation:
Department of Mechanical Engineering, Iowa State University, Ames, IA 50011, USA
Sriram Sundararajan*
Affiliation:
Department of Mechanical Engineering, Iowa State University, Ames, IA 50011, USA
*
Corresponding author. E-mail: [email protected]
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Abstract

Three-dimensional atom probe tomography (APT) is successfully used to analyze the near-apex regions of an atomic force microscope (AFM) tip. Atom scale material structure and chemistry from APT analysis for standard silicon AFM tips and silicon AFM tips coated with a thin film of Cu is presented. Comparison of the thin film data with that observed using transmission electron microscopy indicates that APT can be reliably used to investigate the material structure and chemistry of the apex of an AFM tip at near atomic scales.

Keywords

atomic force microscope (AFM)atom probe microscope3D atom probe tomography (APM)thin film
Type
Atomic Force and Atom Probe Applications
Information
Microscopy and Microanalysis , Volume 16 , Issue 5 , October 2010 , pp. 636 - 642
Copyright
Copyright © Microscopy Society of America 2010

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