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Assessing the Composition of Wide Bandgap Compound Semiconductors by Atom Probe Tomography: A Metrological Problem

Published online by Cambridge University Press:  25 July 2016

L. Rigutti ,
L. Mancini ,
E. Di Russo ,
I. Blum ,
F. Moyon ,
W. Lefebvre ,
D. Blavette ,
F. Vurpillot ,
E. Giraud  and
J.F. Carlin
...Show all authors
L. Rigutti
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
L. Mancini
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
E. Di Russo
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
I. Blum
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
F. Moyon
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
W. Lefebvre
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
D. Blavette
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
F. Vurpillot
Affiliation:
Groupe de Physique des Matériaux, UMR 6634 CNRS, University and INSA of Rouen, Normandie University, 76800 St. Etienne du Rouvray, France
E. Giraud
Affiliation:
Institute of Physics (IPhys), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015, Lausanne, Switzerland
J.F. Carlin
Affiliation:
Institute of Physics (IPhys), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015, Lausanne, Switzerland
R. Butté
Affiliation:
Institute of Physics (IPhys), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015, Lausanne, Switzerland
N. Grandjean
Affiliation:
Institute of Physics (IPhys), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015, Lausanne, Switzerland
N. Gogneau
Affiliation:
Laboratoire de Photonique et Nanostructures CNRS, Université Paris-Saclay, 91460 Marcoussis, France
L. Largeau
Affiliation:
Laboratoire de Photonique et Nanostructures CNRS, Université Paris-Saclay, 91460 Marcoussis, France
F. H. Julien
Affiliation:
Institut d’Electronique Fondamentale, UMR 8622 CNRS, University Paris Saclay, 91405 Orsay, France
M. Tchernycheva
Affiliation:
Institut d’Electronique Fondamentale, UMR 8622 CNRS, University Paris Saclay, 91405 Orsay, France
J.M. Chauveau
Affiliation:
Centre de Recherche sur l’Hétéro-Epitaxie et ses Applications, UPR10 CNRS, 06560 Valbonne, France
M. Hugues
Affiliation:
Centre de Recherche sur l’Hétéro-Epitaxie et ses Applications, UPR10 CNRS, 06560 Valbonne, France

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 650 - 651
Copyright
© Microscopy Society of America 2016 

References

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[10] This work was funded through projects EMC3 Labex AQuRATE, EMC3 Labex ASAP, ANR-13-JS10-0001-01 Tapoter and ANR JCJC TIPSTEM.Google Scholar