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Aspects of Beam Control for Single and Dual Beam Systems

Published online by Cambridge University Press:  09 April 2017

K Lagarec ,
A Laquerre  and
M Phaneuf
K Lagarec
Affiliation:
Fibics Incorporated, Canada
A Laquerre
Affiliation:
Fibics Incorporated, Canada
M Phaneuf
Affiliation:
Fibics Incorporated, Canada

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 676 - 677
Copyright
Copyright © Microscopy Society of America 2011