Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-02T19:51:06.600Z Has data issue: false hasContentIssue false
  • English
  • Français

Ar+ FIB Milling and Measurement of FIB Damage in Silicon

Published online by Cambridge University Press:  05 August 2019

Brandon Van Leer ,
Huikai Cheng  and
Mikhail Dutka
Brandon Van Leer
Affiliation:
Thermo Fisher Scientific, 5350 NW Dawson Creek Drive, Hillsboro, ORUSA.
Huikai Cheng
Affiliation:
Thermo Fisher Scientific, 5350 NW Dawson Creek Drive, Hillsboro, ORUSA.
Mikhail Dutka
Affiliation:
Thermo Fisher Scientific, Materials & Structural Analysis, Eindhoven, the Netherlands.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 886 - 887
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Giannuzzi, LA et al. , Microscopy and Microanalysis 11 (2005).Google Scholar
[2]Van Leer, B et al. , Microscopy and Microanalysis (2013).Google Scholar
[3]Ziegler, JF and Biersack, JP, SRIM 2003, www.SRIM.com.Google Scholar