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Applications of a Novel FIB-SIMS Instrument in SIMS Image Depth Profiling

Published online by Cambridge University Press:  01 August 2002

G. McMahon ,
J. Nxumalo  and
M.W. Phaneuf
G. McMahon
Affiliation:
Fibics Inc., 556 Booth St. Suite 200, Ottawa, ON Canada K1A 0G1
J. Nxumalo
Affiliation:
Semiconductor Insights, 3000 Solandt Rd., Kanata, ON Canada K2K 2X2
M.W. Phaneuf
Affiliation:
Fibics Inc., 556 Booth St. Suite 200, Ottawa, ON Canada K1A 0G1

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1212 - 1213
Copyright
Copyright © Microscopy Society of America 2002