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The Application of GPGPU to Automatic Electron Gun Alignment in the Scanning Electron Microscope

Published online by Cambridge University Press:  27 August 2014

D. M. Holburn ,
B.C. Breton ,
An Li  and
N. H. M. Caldwell
D. M. Holburn
Affiliation:
Department of Engineering, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
B.C. Breton
Affiliation:
Department of Engineering, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
An Li
Affiliation:
Department of Engineering, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
N. H. M. Caldwell
Affiliation:
Department of Engineering, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 46 - 47
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Caldwell, N.H.M., et al Microsc. Microanal. 19 (Suppl S2 (2013), p. 792.Google Scholar
[2] Caldwell, N.H.M., et al Microsc. Microanal. 19 (Suppl S2 (2013), p. 774.Google Scholar
[3] NVIDIA GeForce and CUDA are trademarks of NVIDIA Corporation. SmartSEM™ is a trademark of Carl Zeiss Microscopy GmbH. This research was supported by funding from Carl Zeiss Microscopy. The authors gratefully acknowledge the assistance of Carl Zeiss staff, especially Daniel Aldridge, David Hubbard and Stewart Bean.Google Scholar