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Application of Focus Ion Beam Technique for TEM Multilayer Materials Examination

Published online by Cambridge University Press:  01 August 2010

J Wojewoda-Budka ,
P Zieba ,
J Morgiel ,
N Sobczak  and
R Nowak
J Wojewoda-Budka
Affiliation:
Polish Academy of Sciences, Poland
P Zieba
Affiliation:
Polish Academy of Sciences, Poland
J Morgiel
Affiliation:
Polish Academy of Sciences, Poland
N Sobczak
Affiliation:
Foundry Research Institute, Poland
R Nowak
Affiliation:
Foundry Research Institute, Poland

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 174 - 175
Copyright
Copyright © Microscopy Society of America 2010