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Application of Electron Microscopy in the Development of a Decapsulation Methodology for Microcircuits with Copper On-Chip Passive Devices

Published online by Cambridge University Press:  24 July 2003

Jake Schaper ,
Thomas Barbieri  and
Rose Stone
Jake Schaper
Affiliation:
Motorola Semiconductor Products Sector, Arizona Product Analysis Lab 2100 E. Elliot Road, Tempe, AZ 85284
Thomas Barbieri
Affiliation:
Motorola Semiconductor Products Sector, Arizona Product Analysis Lab 2100 E. Elliot Road, Tempe, AZ 85284
Rose Stone
Affiliation:
Motorola Semiconductor Products Sector, Arizona Product Analysis Lab 2100 E. Elliot Road, Tempe, AZ 85284

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 1050 - 1051
Copyright
Copyright © Microscopy Society of America 2003