Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-29T00:01:29.095Z Has data issue: false hasContentIssue false
  • English
  • Français

Application of EFTEM and XEDS Elemental Mapping to Characterization of Nanometer Devices in Semiconductor Wafer-Foundries

Published online by Cambridge University Press:  23 September 2015

Wayne W. Zhao ,
Michael Gribelyuk  and
Jeremy D. Russell
Wayne W. Zhao
Affiliation:
Engineering Analysis - Physical, Technology Development & Yield Engineering, GLOBALFOUNDRIES, Malta, New York, USA.
Michael Gribelyuk
Affiliation:
Engineering Analysis - Physical, Technology Development & Yield Engineering, GLOBALFOUNDRIES, Malta, New York, USA.
Jeremy D. Russell
Affiliation:
Engineering Analysis - Physical, Technology Development & Yield Engineering, GLOBALFOUNDRIES, Malta, New York, USA.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 279 - 280
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Zhao, W., et al., Microscopy & Microanalysis Vol. 20(Supplement 3) (2014). pp 362–363.Google Scholar
[2] Zhao, W., Gribelyuk, M., et al., Proc. 38th International Symposium for Testing and Failure Analysis (2012). pp 347–355.Google Scholar
[3] Zhao, W., Symp. Proc. the Material Research Society, Fall Meeting (2002), Vol. 738, pp. G7.15.l~6.Google Scholar
[4] Leapman, R. & Hunt, J., Microscopy, Microanalysis, Microstructure Vol. 2 (1991). pp 231–244.Google Scholar
[5] Harrach, H., et al., Microscopy & Microanalysis Vol. 16(Supplement 2) (2010). pp 1312–1313.Google Scholar
[6] The authors wish to thank and acknowledge Derrick Franks for preparing this TEM sample..Google Scholar