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Application of Atom Probe Tomography to Atomic Layer Deposited Thin Films

Published online by Cambridge University Press:  09 October 2013

A.D. Giddings ,
T.J. Prosa ,
T.F. Kelly  and
D.J. Larson
A.D. Giddings
Affiliation:
T.J. Prosa
Affiliation:
T.F. Kelly
Affiliation:
D.J. Larson
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1028 - 1029
Copyright
Copyright © Microscopy Society of America 2013