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Application of Atom Probe on Fully Depleted Silicon-On-Insulator (FDSOI) Structures

Published online by Cambridge University Press:  25 July 2016

Ajay Kumar Kambham ,
Dan Flatoff  and
Bianzhu Fu
Ajay Kumar Kambham
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA
Dan Flatoff
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA
Bianzhu Fu
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 696 - 697
Copyright
© Microscopy Society of America 2016 

References

References:

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[2] Sergej, Makovejev, et al, In Solid-State Electronics (p. 6 (2015) doi:10.1016/j.sse.2014.12.007.Google Scholar
[3] Larson, David J, et al, Hand book of Instrumentation and Techniques for Semiconductor Nano structure characterization: Chapter Atom Probe Tomography for Microelectronics.Google Scholar
[4] Ajay Kumar, Kambham, et al, Nanotechnology 24 (2013). 275705 (7pp).Google Scholar