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Angle-Resolved X-Ray Depth Profiling: Interpretation of Angleresolved Profiles Using a Monte Carlo Approach

Published online by Cambridge University Press:  02 July 2020

D.K. Wilkinson ,
M. Prutton  and
D.A. Loveday
D.K. Wilkinson
Affiliation:
Department of Physics, The University of York, Heslington, York, Y010 5DD, UK
M. Prutton
Affiliation:
Department of Physics, The University of York, Heslington, York, Y010 5DD, UK
D.A. Loveday
Affiliation:
Department of Physics, The University of York, Heslington, York, Y010 5DD, UK
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Extract

A technique has been developed for the interpretation of composition depth profiles from angleresolved x-ray data using a Monte Carlo electron scattering simulation. Conventional methods for the interpretation of angle-resolved depth profiles used in the fields of x-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) assume that the outgoing signal is exponentially attenuated along its path. This assumption if not valid for angle-resolved x-ray techniques, as the x-ray signal is dependent on both the paths of the incident electrons and the path of the emitted x-rays. In this case, while the latter can be treated using an exponential attenuation, the path of the incident beam is more complex and corresponds to the well known “pear-shaped” interaction volume. In order to reliably interpret angle-resolved depth profiles in which the angle of the incident beam is varied, it is necessary to be able to obtain the distribution of x-ray emission within the sample for any angle of incidence.

Type
Mas Celebrates: Fifty Years of Electron Probe Microanalysis
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 582 - 583
Copyright
Copyright © Microscopy Society of America

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