Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-27T09:56:27.272Z Has data issue: false hasContentIssue false
  • English
  • Français

Analytical Method for Electron Gun Calculation

Published online by Cambridge University Press:  28 September 2015

Oleg D. Potapkin
Oleg D. Potapkin*
Affiliation:
Moscow State Technical University of Radioengineering, Electronics & Automatics, Prospect Vernadskogo 78, 119454 Moscow, Russia

Abstract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

The model of thermionic electron gun was developed. The Dirichlet problem for the cylinder (the Wehnelt electrode) restricted by two bottoms, one of them imitates a plane cathode and another imitates the equipotential surface, was solved analytically. It allows to study electron optical properties of the gun and its behaviour in dependence on Wehnelt potential for different cylinder depths. When the focal distance and the crossover size have the minimal value, this mode is called a work one. The crossover size and the beam half-angle values in this mode were approximated and the analytical method for electron gun calculation was developed.

Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 252 - 257
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1]Saito, K, et al, Proc. SPIE 2858 (1996). p. 22.Google Scholar
[2]Pfeiffer, HC & Stickel, W, Proc. SPIE 7378 (2009) 737802.CrossRefGoogle Scholar
[3]DeVore, W & Berger, SD, J. Vac. Sci. Technol. B 14 (1996). p. 3764.CrossRefGoogle Scholar
[4]Petric, P, et al., J. Vac. Sci. Technol. B. 27 (2009). p. 161.CrossRefGoogle Scholar
[5]Lauer, R, Adv. Opt. Electron Microsc. 8 (1982). p. 137.Google Scholar
[6]Lauer, R, Z. Naturforsch. 23a (1968). p. 100.CrossRefGoogle Scholar
[7]Potapkin, OD, Phys. Procedia 1 (2008). p. 77.CrossRefGoogle Scholar
[8]Potapkin, OD, Izv. RAN Ser. Fiz 68 (2004). p. 1362. (in Russian).Google Scholar
[9]Potapkin, OD, Bull. RAN Phys 73 (2009). p. 478.Google Scholar
[10]Rose, HH in Geometrical Charged Particle Optics. Springer, Berlin (2009). p. 349.Google Scholar
[11]Lenc, M & Mullerova, I., Ultramicroscopy 41 (1992). p. 411.CrossRefGoogle Scholar
[12]Hawkes, PW & Kasper, E in Principles of Electron Optics. Academic, London (1995.Google Scholar
[13]Kruit, P & Jansen, H in Handbook of Charged Particle Optics (ed. J Orloff, CRC Press, BocaRaton (1997). p. 275.Google Scholar