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An Ultra-High-Tilt Two-Contact Electrical Biasing Specimen Holder for Electron Holography and Electron Tomography of Semiconductor Devices

Published online by Cambridge University Press:  01 August 2004

Rafal E Dunin-Borkowski ,
Alison C Twitchett ,
Jonathan S Barnard ,
Ronald F Broom ,
Paul A Midgley ,
Alan C Robins ,
David W Smith ,
Jeff J Gronsky  and
Paul E Fischione
Rafal E Dunin-Borkowski
Affiliation:
University of Cambridge, United Kingdom
Alison C Twitchett
Affiliation:
University of Cambridge, United Kingdom
Jonathan S Barnard
Affiliation:
University of Cambridge, United Kingdom
Ronald F Broom
Affiliation:
University of Cambridge, United Kingdom
Paul A Midgley
Affiliation:
University of Cambridge, United Kingdom
Alan C Robins
Affiliation:
E.A. Fischione Instruments, Export, Pennsylvania
David W Smith
Affiliation:
E.A. Fischione Instruments, Export, Pennsylvania
Jeff J Gronsky
Affiliation:
E.A. Fischione Instruments, Export, Pennsylvania
Paul E Fischione
Affiliation:
E.A. Fischione Instruments, Export, Pennsylvania
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1012 - 1013
Copyright
© 2004 Microscopy Society of America

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