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An Optimized In-column Detection System for the Ultra-high Resolution BrightBeamTM SEM Column

Published online by Cambridge University Press:  30 July 2020

Jaroslav Jiruše ,
Petr Sytař ,
Jan Páral  and
Tomáš Hrnčíř
Jaroslav Jiruše
Affiliation:
TESCAN Brno s.r.o., Brno, Jihomoravsky kraj, Czech Republic
Petr Sytař
Affiliation:
TESCAN Brno s.r.o., Brno, Jihomoravsky kraj, Czech Republic
Jan Páral
Affiliation:
TESCAN Brno s.r.o., Brno, Jihomoravsky kraj, Czech Republic
Tomáš Hrnčíř
Affiliation:
TESCAN Brno s.r.o., Brno, Jihomoravsky kraj, Czech Republic

Abstract

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Type
Vendor Symposium - Imaging
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1806 - 1807
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Copyright
Copyright © Microscopy Society of America 2020

References

Sytař, P., Jiruše, J. and Závodný, A., Microscopy and Microanalysis, 2017, 23, pp. 38-39.Google Scholar
Jiruše, J., Havelka, M., Polster, J., Sytař, P., Páral, J., Kološová, J., Microscopy and Microanalysis, 2018, 24 (Suppl 1), pp. 606-607.10.1017/S1431927618003525CrossRefGoogle Scholar