AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing

Christopher Santeufemio

doi:10.1017/S143192760210376X

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AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing

Published online by Cambridge University Press: 01 November 2002

Christopher Santeufemio

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Christopher Santeufemio*: Affiliation:
Epion Corporation, 37 Manning Road, Billerica, MA 01821

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Information: Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1138 - 1139

DOI: https://doi.org/10.1017/S143192760210376X [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2002

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AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing

Volume 8, Issue S02
Christopher Santeufemio ^(a1)
DOI: https://doi.org/10.1017/S143192760210376X

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AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing

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