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Advanced Characterization of Emerging Semiconductor Devices Using Low Energy, Broad Ion Beam Argon Milling

Published online by Cambridge University Press:  04 August 2017

P. Nowakowski ,
J. Sagar ,
M.L. Ray  and
P.E. Fischione
P. Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., 9003 Corporate Circle, Export, PA, USA
J. Sagar
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, Bucks, UK
M.L. Ray
Affiliation:
E.A. Fischione Instruments, Inc., 9003 Corporate Circle, Export, PA, USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments, Inc., 9003 Corporate Circle, Export, PA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1408 - 1409
Copyright
© Microscopy Society of America 2017 

References

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