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Accurate Removal of Implanted Gallium and Amorphous Damage from TEM Specimens after Focused Ion Beam (FIB) Preparation

Published online by Cambridge University Press:  04 August 2017

P. Nowakowski ,
C.S. Bonifacio ,
M.J. Campin ,
M.L. Ray  and
P.E. Fischione
P. Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA 15632USA
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA 15632USA
M.J. Campin
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA 15632USA
M.L. Ray
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA 15632USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA 15632USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 300 - 301
Copyright
© Microscopy Society of America 2017 

References

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[3] Ancey, M, Bastenaire, F & Tixier, R J. Phys. D: Appl. Phys 10 1977). p. 817.CrossRefGoogle Scholar
[4] Nowakowski, P, et al, Surf. Sci 605 2011). p. 848.CrossRefGoogle Scholar