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Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Published online by Cambridge University Press:  04 August 2017

Eva Grünwald ,
René Hammer ,
Jördis Rose ,
Bernhard Sartory  and
Roland Brunner
Eva Grünwald
Affiliation:
Materials Center Leoben Forsehung GmbH, Leoben, Austria
René Hammer
Affiliation:
Materials Center Leoben Forsehung GmbH, Leoben, Austria
Jördis Rose
Affiliation:
Materials Center Leoben Forsehung GmbH, Leoben, Austria
Bernhard Sartory
Affiliation:
Materials Center Leoben Forsehung GmbH, Leoben, Austria
Roland Brunner
Affiliation:
Materials Center Leoben Forsehung GmbH, Leoben, Austria

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1466 - 1467
Copyright
© Microscopy Society of America 2017 

References

[1] Grünwald, E., et al, Microelectron. Reliab. 64 2016). p. 370.Google Scholar
[2] Brand, S., et al, Microelectron. Reliab. 50 2012). p. 1469.Google Scholar
[3] Fellinger, P., et al, Wave Motion 21 1995). p. 47.Google Scholar
[4] The ams AG is acknowledged for their support. This work has received funding from ENIAC Joint undertaking under FP7 research (No.:621270) and FFG (No.:843740) and partly from the EU, H2020 (No.: 688225). Financial support by the Austrian Federal Government (in particular from Bundesministerium für Verkehr, Innovation und Technologie and Bundesministerium für Wissenschaft, Forschung und Wirtschaft) represented by Österreichische Forschungsförderungsgesellschaft mbH and the Styrian and the Tyrolean Provincial Government, represented by Steirische Wirtschaftsförderungsgesellschaft mbH and Standortagentur Tirol, within the framework of the COMET Funding Programme (No. 837900) is also gratefully acknowledged.Google Scholar