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Published online by Cambridge University Press: 02 July 2020
Diamond-like carbon (DLC) has attracted considerable interest with a variety of potential applications [1]. A new class of amorphous films has been produced recently by incorporating metals within the carbon network. The electrical conductivity of these films varies a wide range, however nonlinear with the metal concentration. It is believed it is because metals may form clusters. Such nano-phase metal cluster encapsulated by an inert matrix can offer interesting applications, for example as nano-electrodes used in electrochemistry[2]. It is therefore fundamentally important to observe the metal cluster formation. By using Z-contrast imaging [3], the metal distribution can be directly determined on the atomic level. The local metal concentration and other electronic properties cafi also be analyzed by spatial resolved electron energy loss spectroscopy (EELS)