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X-Ray Microanalysis in the STEM

Published online by Cambridge University Press:  02 July 2020

D. B. Williams  and
M. Watanabe
D. B. Williams
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA18015, USA
M. Watanabe
Affiliation:
Research Laboratory for High Voltage Electron Microscopy, Kyushu University, Fukuoka 812-8581, Japan
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Extract

Commercial TEM/STEMs are ill designed for quantitative X-ray microanalysis of thin foils. There have been no fundamental advances in their design since the first instruments appeared in the mid- 1970s. These instruments had thermionic sources with useful probe sizes of ∼10 nm, small (∼ 0.1 sr) detector collection angles, illumination systems giving serious levels of stray radiation, substantial hydrocarbon and water-vapor contamination due to the poor vacuum (∼10-5Pa) and sliding o-ring seals on unstable side-entry goniometer stages. The instruments lacked a direct measure of the probe current at the specimen. Often a 60 s accumulation time resulted in enough drift or contamination that the microanalysis was not trustworthy and spatial resolution was compromised. Today's modern TEM/STEMs, apart from replacement of thermionic source with a FEG, are little better.

Dedicated STEMs however, have invariably offered better X-ray performance. The first VG HB 5 DSTEM became available, also in the 1970s, and the X-ray performance improved through to the latest design (the VG HB 603) in the mid-1990s.

Type
The Theory and Practice of Scanning Transmission Electron Microscopy
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 112 - 113
Copyright
Copyright © Microscopy Society of America

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