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A Transmission Electron Microscopy Study of the Effect of Interfaces on Bubble Formation in He-Implanted Cu-Nb Multilayers

Published online by Cambridge University Press:  18 January 2012

D. Bhattacharyya ,
M.J. Demkowicz ,
Y.-Q. Wang ,
R.E. Baumer ,
M. Nastasi  and
A. Misra
D. Bhattacharyya*
Affiliation:
Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
M.J. Demkowicz
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
Y.-Q. Wang
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
R.E. Baumer
Affiliation:
Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
M. Nastasi
Affiliation:
Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
A. Misra
Affiliation:
Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
*
Corresponding author. E-mail: [email protected], [email protected]
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Abstract

Magnetron sputtered thin films of Cu, Nb, and Cu-Nb multilayers with 2.5 and 5 nm nominal layer thickness were deposited on Si and implanted with 4He+ and 3He+ ions. Secondary ion mass spectroscopy and nuclear reaction analysis, respectively, were used to measure the 4He+ and 3He+ concentration profile with depth inside the films. Cross-sectional transmission electron microscopy was used to characterize the helium bubbles. Analysis of the contrast from helium bubbles in defocused transmission electron microscope images showed a minimum bubble diameter of 1.25 nm. While pure Cu and Nb films showed bubble contrast over the entire range of helium implantation, the multilayers exhibited bubbles only above a critical He concentration that increased almost linearly with decreasing layer thickness. The work shows that large amounts of helium can be trapped at incoherent interfaces in the form of stable, nanometer-size bubbles.

Keywords

transmission electron microscopynanoscale multilayersHe bubblesinterface effects
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 18 , Issue 1 , February 2012 , pp. 152 - 161
Copyright
Copyright © Microscopy Society of America 2012

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