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Thin Film Properties Measurement using SEM-based Energy Dispersive Spectroscopy for Nanoscience Studies

Published online by Cambridge University Press:  03 August 2008

S Sharp ,
S Burgess ,
C Hodson  and
Q Fang
S Sharp
Affiliation:
Oxford Instruments Nanoanalysis, United Kingdom
S Burgess
Affiliation:
Oxford Instruments Nanoanalysis, United Kingdom
C Hodson
Affiliation:
Oxford Instruments Plasma Technology, United Kingdom
Q Fang
Affiliation:
Oxford Instruments Plasma Technology, United Kingdom
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 336 - 337
Copyright
© 2008 Microscopy Society of America

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