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Surface chemistry of Al(CH3)3 and TiCl4 on GaAs(100) and InGaAs during the first half-cycle of atomic layer deposition

Published online by Cambridge University Press:  23 November 2012

B. Granados ,
F. Lie  and
A. Muscat
B. Granados
Affiliation:
Chemical and Environmental Engineering, University of Arizona, Tucson, AZ
F. Lie
Affiliation:
Chemical and Environmental Engineering, University of Arizona, Tucson, AZ
A. Muscat
Affiliation:
Chemical and Environmental Engineering, University of Arizona, Tucson, AZ
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 906 - 907
Copyright
Copyright © Microscopy Society of America 2012

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