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Static and Dynamic Charges: Changing Perspectives and Aims in Electron Microscopy

Published online by Cambridge University Press:  01 December 2004

Archie Howie
Archie Howie
Affiliation:
Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge CB3 0HE, UK
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Abstract

In the context of electron microscopists' changing attitudes to charging effects, some basic aspects of these phenomenona are surveyed. Methods of mapping internal charge distributions such as doping levels in semiconductors, trap distributions, or internal electric fields in insulators are discussed.

Keywords

chargingESEMscanning capacitance microscopycathodoluminescence
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 6 , December 2004 , pp. 685 - 690
Copyright
© 2004 Microscopy Society of America

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References

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