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Some Electric Field Effects in the Microbeam Analysis of Insulators

Published online by Cambridge University Press:  02 July 2020

J. Cazaux ,
M. Belhaj ,
O. Jbara ,
G. Remond  and
S. Odof
J. Cazaux
Affiliation:
DTI, CNRS UMR 6107, UFR Sciences, BP 1039, 51687, Reims, Cedex 2, France.
M. Belhaj
Affiliation:
DTI, CNRS UMR 6107, UFR Sciences, BP 1039, 51687, Reims, Cedex 2, France.
O. Jbara
Affiliation:
DTI, CNRS UMR 6107, UFR Sciences, BP 1039, 51687, Reims, Cedex 2, France.
G. Remond
Affiliation:
ANRT, G8, 41 bvd des Capucines, 75116, Paris, France.
S. Odof
Affiliation:
DTI, CNRS UMR 6107, UFR Sciences, BP 1039, 51687, Reims, Cedex 2, France.
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Abstract

Mechanisms in electrostatic charging of insulating materials during electron irradiation are very difficult to predict because they involve cross-correlated parameters: the surface potential, Vs and the secondary electron yield,δ, for bare specimens; the possible change of the bulk composition induced by the internal electric field for ground coated specimens. A better understanding of these mechanisms requires efforts from both the theoretical and the experimental points of view.

From the theoretical point of view, a two-layer model for distribution of the trapped charges (Q+ over the escape depth of the secondaries, s; Q‐ over the maximum penetration depth R of the incident electrons) often permits to account for many charging effects observed on bare specimens. For instance, the failure of the total yield approach may be partly explained by the fact that the charge distribution expected at the critical energy Ec2 (where δ+ η=l) corresponds to Q+=‐Q‐ but also to R ≫ s at the early beginning of the SEM and EDS investigation.

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in The ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 666 - 667
Copyright
Copyright © Microscopy Society of America 2001

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References

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