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A Simple Low-Vacuum Environmental Cell

Published online by Cambridge University Press:  31 January 2003

Matthew H. Ervin
Matthew H. Ervin
Affiliation:
U.S. Army Research Laboratory, MS: AMSRL-SE-RL, 2800 Powder Mill Road, Adelphi, MD 20783-1197, USA
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Abstract

The environmental cell device discussed in this paper provides a modest low-vacuum scanning electron microscopy (SEM) capability to a standard SEM without requiring additional pumping. This environmental cell confines a volume of low vacuum in contact with the sample surface using a container that has an aperture for admitting the primary electron beam. The aperture is large enough to permit a limited field of view of the sample, and small enough to limit the outflow of gas into the SEM chamber to that which can be accommodated by the standard SEM pumping system. This environmental cell also functions as a gaseous detector device.

Keywords

environmental SEMlow-vacuum SEMin situ SEMionization cascadeenvironmental celldifferential pumpingenvironmental secondary detectiongaseous detector device
Type
Instrumentation and Technique
Information
Microscopy and Microanalysis , Volume 9 , Issue 1 , February 2003 , pp. 18 - 28
Copyright
© 2003 Microscopy Society of America

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