Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-24T20:02:03.919Z Has data issue: false hasContentIssue false

SEM 3D Reconstruction of Stained Bulk Samples using Landing Energy Variation and Deconvolution

Published online by Cambridge University Press:  23 November 2012

F. Boughorbel
Affiliation:
FEI Company, Eindhoven, Netherlands
X. Zhuge
Affiliation:
FEI Company, Eindhoven, Netherlands
P. Potocek
Affiliation:
FEI Company, Eindhoven, Netherlands
B. Lich
Affiliation:
FEI Company, Eindhoven, Netherlands
Get access

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)