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'Secondary’ Electron Detector Design and Positioning in the Variable Pressure Scanning Electron Microscope: The Colour Option

Published online by Cambridge University Press:  02 July 2020

Brendan J. Griffin ,
James R. Browne ,
Louise Egerton-Warburton  and
Dominique Drouin
Brendan J. Griffin
Affiliation:
Western Australian Centre for Microscopy, The University of Western Australia, Nedlands, WA6907
James R. Browne
Affiliation:
Western Australian Centre for Microscopy, The University of Western Australia, Nedlands, WA6907
Louise Egerton-Warburton
Affiliation:
Western Australian Centre for Microscopy, The University of Western Australia, Nedlands, WA6907
Dominique Drouin
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, CANADAJ1K 2R1
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Extract

The simple models for low energy secondary electron (SE) detection in the variable pressure or environmental scanning electron microscope (ESEM) describe a gas-amplified cascade from sample to detector when a conventional biased detector is used. Recent images obtained using a modified specimen current imaging approach however have suggested that at least a portion of the image is an induced field effect, in agreement with some of the early work. Our recent aim has been to investigate a range of detector designs and positions within the chamber in both the old ElectroScan E-3 model ESEM and the current generation FEI XL30 ESEM TMP. The results support the earlier observations of induced signal components being present, with even ‘negative’ or inverted images being obtained under some detector configurations due to the noise cancellation techniques used (figure 1). These results are being quantified using the DQE measurement approach to allow an objective comparison of different designs and positions. This data will be presented for the commercially available detectors and for the ‘Griffin’ grid detector under a range of operating conditions.

Type
Working with ESEM and Other Variable Pressure Systems
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 772 - 773
Copyright
Copyright © Microscopy Society of America

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References

References:

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6. This project was funded by the Australian Research Council and the University of Western Australia. Email: Google Scholar