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Redeposition Effects in TEM Sample Preparation of Feal-Based Metal Matrix Composites using the Focused Ion Beam Miller

Published online by Cambridge University Press:  02 July 2020

Julie M. Cairney  and
Paul R. Munroe
Julie M. Cairney
Affiliation:
Electron Microscope Unit, University of New South Wales, Sydney, NSW, 2052, Australia.
Paul R. Munroe
Affiliation:
Electron Microscope Unit, University of New South Wales, Sydney, NSW, 2052, Australia.
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Extract

The focused ion beam miller (FIB) has been widely used in the semiconductor industry for many years, but only recently has its potential as a tool for materials science been recognised. The FIB uses a highly energetic beam of gallium ions to sputter material such that it can precisely section, as well as image, areas of interest. The FIB can be used to create crosssections, which can be examined in the FIB or in a scanning electron microscope (SEM). Cross sections can be made from delicate samples or samples in which a specific area needs to be viewed, for example to check the thickness of coatings or for failure analysis.

The FIB may also be used to prepare transmission electron microscope (TEM) specimens [1]. Extremely site-specific thin areas may be prepared with high positional accuracy from heterogeneous samples such as composites or layered structures.

Type
Applications and Developments of Focused Ion Beams
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 514 - 515
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Overwijk, M.H.F., et al., J. Vac. Sci. Technol., Bl 1 (1993)2021.CrossRefGoogle Scholar
2.Prenitzer, B.I. et al., Metall. Mater. Trans. A., 29A (1988)2399.Google Scholar
3.Cairney, J.M. et al., Microscopy and Microanalysis, in submission, (1999).Google Scholar