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Preparation of Large Area Site Specific Plan View TEM Samples by Combining Focused Ion Beam and Etching Techniques

Published online by Cambridge University Press:  01 August 2004

A. Anciso ,
P.J. Jones  and
R.B. Irwin
A. Anciso
Affiliation:
Texas InstrumentsDallas, Texas
P.J. Jones
Affiliation:
Texas InstrumentsDallas, Texas
R.B. Irwin
Affiliation:
Texas InstrumentsDallas, Texas
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1162 - 1163
Copyright
© 2004 Microscopy Society of America

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