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Planar defects in patterned GaAs by aberration corrected STEM

Published online by Cambridge University Press:  23 November 2012

R. dos Reis ,
Z. Liliental-Weber ,
C. Ophus ,
J. Jimenez ,
M. Snure  and
B. Gerard
R. dos Reis
Affiliation:
Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA
Z. Liliental-Weber
Affiliation:
Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA
C. Ophus
Affiliation:
National Center for Electron Microscopy, LBNL, Berkeley, CA
J. Jimenez
Affiliation:
Física de la Matéria Condensada, Universidad de Valladolid, Valladolid, Spain
M. Snure
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Hascom AFB, MA
B. Gerard
Affiliation:
Thales-Alcatel III-V Laboratory, Palaiseau Cedex, France
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 338 - 339
Copyright
Copyright © Microscopy Society of America 2012

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