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Optimizing Hardness and Residual Stress in Sputtered TiN Coatings

Published online by Cambridge University Press:  01 August 2004

Surendra Gupta ,
David Glocker  and
Mark Romach
Surendra Gupta
Affiliation:
Rochester Institute of Technology, Rochester, New York
David Glocker
Affiliation:
Isoflux Inc., Rochester, New York
Mark Romach
Affiliation:
Isoflux Inc., Rochester, New York
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 600 - 601
Copyright
© 2004 Microscopy Society of America

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