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Nondestructive Angle-resolved X-ray Depth Profiling: Interpretation of Angle-resolved Profiles Using a Monte Carlo Approach

Published online by Cambridge University Press:  07 August 2002

David K. Wilkinson ,
Daniel A. Loveday  and
Martin Prutton
David K. Wilkinson*
Affiliation:
Department of Physics, The University of York, Heslington, York, YO10 5DD, UK
Daniel A. Loveday
Affiliation:
Department of Physics, The University of York, Heslington, York, YO10 5DD, UK
Martin Prutton
Affiliation:
Department of Physics, The University of York, Heslington, York, YO10 5DD, UK
*
*Corresponding author, at York Technologies Ltd., 34 Barbican Mews, York YO10 5BZ, UK.
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Abstract

A technique has been developed for the interpretation of composition-depth profiles from angleresolved X-ray data using a Monte Carlo electron scattering simulation. This is a nondestructive depth profiling procedure. Software has been developed that uses a Monte Carlo scattering simulation to generate the signal intensity from a multilayer sample for any combination of primary beam angle of incidence and take-off angle to the X-ray detector. An interactive C++ application uses this simulation to interpret measured angle-resolved depth profiles. The method has been tested using a custom-made Ag/Al “staircase” sample containing two layers each of Ag and Al. Using the technique, it is possible to quantify the composition-depth profile for the two- and three-layer “steps” of the sample. Qualitative information may be gained about the four-layer area of the sample.

Keywords

composition-depth profilingnondestructiveX-rayspectrometryMonte Carlomultilayermicroanalysis
Type
Research Article
Information
Microscopy and Microanalysis , Volume 6 , Issue 6 , November 2000 , pp. 517 - 531
Copyright
Copyright © Microscopy Society of America 2000

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