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A New and Unexpected Spatial Relationship Between Interaction Volume and Diffraction Pattern in Electron Microscopy in Transmission

Published online by Cambridge University Press:  05 December 2018

Etienne Brodu*
Affiliation:
Laboratoire d’Etude des Microstructures et de Mécanique des Matériaux (LEM3), Université de Lorraine, UMR CNRS 7239, 57045 Metz, France Laboratory of Excellence on Design of Alloy Metals for low-MAss Structures (DAMAS), University of Lorraine, 57045 Metz, France
Emmanuel Bouzy*
Affiliation:
Laboratoire d’Etude des Microstructures et de Mécanique des Matériaux (LEM3), Université de Lorraine, UMR CNRS 7239, 57045 Metz, France Laboratory of Excellence on Design of Alloy Metals for low-MAss Structures (DAMAS), University of Lorraine, 57045 Metz, France
*
Authors for correspondence: Etienne Brodu, E-mail: [email protected]; Emmanuel Bouzy, E-mail: [email protected]
Authors for correspondence: Etienne Brodu, E-mail: [email protected]; Emmanuel Bouzy, E-mail: [email protected]
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Abstract

The finding of this study is that the interaction volume in electron microscopy in transmission is well ordered laterally, with a remarkable and unexpected consequence being that lateral subsections of the interaction volume produce subsections of the Kikuchi diffraction pattern. It makes the microstructure of samples directly visible in Kikuchi patterns. This is first illustrated with polycrystalline Ti–10Al–25Nb with an on-axis transmission Kikuchi diffraction set-up in a scanning electron microscope. It is then shown via a Monte Carlo simulation and a large-angle convergent-beam electron diffraction experiment that this phenomenon finds its origin in the nature of the differential elastic and quasi-elastic cross sections. This phenomenon is then quantified by a careful image analysis of Kikuchi patterns recorded across a vertical interface in a silicon sample specifically designed and fabricated. A Monte Carlo simulation reproducing all the geometric parameters is conducted. Experiments and simulations match very well qualitatively, but with a slight quantitativity gap. The specificity of the thermal diffuse scattering cross-section, not available in the simulation, is thought to be responsible for this gap. Beside Kikuchi diffraction, the case of diffraction spots and diffuse background present in the pattern is also discussed.

Type
Materials Science Applications
Copyright
© Microscopy Society of America 2018 

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Footnotes

Cite this article: Brodu E, Bouzy E (2018) A New and Unexpected Spatial Relationship Between Interaction Volume and Diffraction Pattern in Electron Microscopy in Transmission. Microsc Microanal. 24(6), 634–646. doi: 10.1017/S1431927618015441

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