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Nanopatterning with the Helium Ion Microscope

Published online by Cambridge University Press:  23 November 2012

D.S. Pickard ,
V. Viswanathan ,
C. Fang ,
Z. Ai ,
H. Hao ,
Y. Wang ,
M. Bosman ,
J. Dorfmüller  and
H. Giessen
D.S. Pickard
Affiliation:
National University of Singapore, Singapore, Singapore
V. Viswanathan
Affiliation:
National University of Singapore, Singapore, Singapore
C. Fang
Affiliation:
National University of Singapore, Singapore, Singapore
Z. Ai
Affiliation:
National University of Singapore, Singapore, Singapore
H. Hao
Affiliation:
National University of Singapore, Singapore, Singapore
Y. Wang
Affiliation:
National University of Singapore, Singapore, Singapore
M. Bosman
Affiliation:
Institute of Materials Research and Engineering (A*STAR), Singapore, Singapore
J. Dorfmüller
Affiliation:
University of Stuttgart, Stuttgart, Germany
H. Giessen
Affiliation:
University of Stuttgart, Stuttgart, Germany
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 800 - 801
Copyright
Copyright © Microscopy Society of America 2012

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