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Monochromatic non-immersion FEG SEM

Published online by Cambridge University Press:  23 November 2012

D. Phifer ,
P. Wandrol ,
B. Sed'a ,
P. Dostál ,
J. Pavliš ,
T. Janočko ,
T. Vystavěl ,
L. Tuma  and
M. Castagna
D. Phifer
Affiliation:
Materials Science Business Unit, FEI Company, Eindhoven, Netherlands
P. Wandrol
Affiliation:
FEI Company, Brno, Czech Republic
B. Sed'a
Affiliation:
FEI Company, Brno, Czech Republic
P. Dostál
Affiliation:
FEI Company, Brno, Czech Republic
J. Pavliš
Affiliation:
FEI Company, Brno, Czech Republic
T. Janočko
Affiliation:
FEI Company, Brno, Czech Republic
T. Vystavěl
Affiliation:
FEI Company, Brno, Czech Republic
L. Tuma
Affiliation:
FEI Company, Brno, Czech Republic
M. Castagna
Affiliation:
FEI Company, Portland, OR
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1282 - 1283
Copyright
Copyright © Microscopy Society of America 2012

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