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Measuring Performance of EDX Systems

Published online by Cambridge University Press:  02 July 2020

Peter Statham
Peter Statham*
Affiliation:
Oxford Instruments Microanalysis Group, Halifax Rd, High Wycombe, Bucks, HP 12 3SE, UK
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Extract

There are no “absolutes” in terms of performance and wherever possible, performance measures need to reflect conditions similar to those in the intended application. Unfortunately, measurements are frequently constrained by practical and economic considerations. For example, the most convenient radiation source for testing EDX systems is the Fe55 radioactive source which produces Mn Kα radiation at 5.9keV and can be used with an air path between source and detector. However, the fwhm resolution at 5.9keV is a rather poor measure of what the resolution will be for x-ray energies below 0.5 keV. Furthermore, “P/B”, the ratio of Mn Kα peak height to background level at IkeV, is only a crude indication of incomplete charge collection ICC, and does not reveal problems that may give rise to shift and broadening of the C Kα peak for example.

Type
30 Years of Energy Dispersive Spectrometry in Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 210 - 211
Copyright
Copyright © Microscopy Society of America

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References

1.Statham, P.J., Proc.EMAS'97, Torquay, UK, 1997. (To be published in Mikrochimica Acta)Google Scholar
2.Statham, P.J.in X-Ray Spectrometry in Electron Beam Instruments, Plenum Press, N.Y., USA, (1995), 101Google Scholar